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Non-destructive Analysis (NDA)

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Technical Concept

Electron Energy Loss Spectroscopy(EELS)equipped on TEM is a powerful technology to analyze the composition of the elements.

The energy resolution of EELS is 1eV or less. By coupling with the functions of TEM, the spatial resolution can be better than 1nm. So EEELS/TEM became one of the popular technology for composition analysis.


(a) 300KV Tita

(b) Gatan 965 EELS


 Filtered imaging of EELS was used to analyze layer’s structure of the low-k materials.



Near the edge, fine structures of EELS were used to analyze the chemical state of the oxygen in different materials of the 16nm high-k materials.



EELS line-scanning analysis was used to inspect the processes of 16nm Low-k materials.




Taiwan Lab

Mr. Hsu

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