LED Surface Analysis
The surface structure and process quality of LED chips directly affect the light output efficiency, heat dissipation capability, and overall reliability of the components. During the processes of LED epitaxial growth, etching, and surface roughening, if there are abnormalities in the surface morphology or microstructure, it may lead to a decrease in luminous efficiency, uneven optical distribution, or instability in component performance.
surface morphology
Optical Interference Profilometer
Scanning Electron Microscope

Scanning electron microscope top view; Observation of surface roughening of LED chips
Chip structures and film thickness
Scanning Electron Microscopy
dual particle beam tomography

dual particle beam tomography for precise cross-sectional imaging
Transmission Electron Microscopy
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Transmission Electron Microscopy cross-sectional image -
(a) MQW and superlattice; (b) HR TEM of MQW; (c) PSS and buffer layer



