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LED Surface Analysis

The surface structure and process quality of LED chips directly affect the light output efficiency, heat dissipation capability, and overall reliability of the components. During the processes of LED epitaxial growth, etching, and surface roughening, if there are abnormalities in the surface morphology or microstructure, it may lead to a decrease in luminous efficiency, uneven optical distribution, or instability in component performance.

 

surface morphology

 

Optical Interference Profilometer

 

Scanning Electron Microscope 

 

LED-11

Scanning electron microscope top view; Observation of surface roughening of LED chips

 

 

Chip structures and film thickness

 

Scanning Electron Microscopy

 

dual particle beam tomography

 

LED-14

dual particle beam tomography for precise cross-sectional imaging

 

Transmission Electron Microscopy

  • Transmission Electron Microscopy cross-sectional image
  • (a) MQW and superlattice; (b) HR TEM of MQW; (c) PSS and buffer layer

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