SRP impedance analyzer

Spreading Resistance Profiling (SRP) is a commonly used electrical measurement technique in semiconductor material analysis, which can measure the depth distribution of junction depth, resistivity, and effective carrier concentration. It is widely applied in ion implantation and process monitoring analysis. The measurement principle of SRP utilizes two microprobes that contact the sample surface and apply a small voltage, measuring the resistance value between the probes, and converting it through calculations to obtain the resistivity and carrier concentration distribution of the material. Before analysis, the sample is fixed on a base with a slight tilt angle and is precisely polished using diamond grinding paste to gradually expose the semiconductor junction, forming a sloped cut surface. As the probes measure point by point along the polished surface, the resistivity and carrier concentration distribution in the depth direction of the material can be obtained, allowing for the analysis of the junction characteristics of semiconductor devices. SRP is often used in conjunction with material analysis techniques such as SIMS to simultaneously obtain information on element concentration and electrical distribution.