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Surface & Film Analysis

In semiconductor and advanced packaging processes, surface morphology and film thickness directly affect product performance and reliability. Through high-resolution surface measurement technology, it can accurately assess the materials'surface roughness, structural morphology, film thickness uniformity and process quality

  • Application scenarios

    • Thin Film Thickness Measurement and Process Monitoring
    • Surface roughness (Roughness) analysis
    • Microstructure and Nano Morphology Observation
    • Etching, deposition, and CMP process quality assessment
  • Core value

    • nanometer-level resolution capability
    • Non-destructive measurement, improving sample preservation integrity
    • Rapid measurement and real-time feedback on the process

     

Service Examples

AFM Atomic Force Microscope

α-step thin film thickness profile measurement instrument

Optical Film Thickness Measurement Instrument

OP White Light Interferometer

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